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Updated: Jul 16, 2025

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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
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High-performance optical phased array for LiDARs demonstrated by monolithic integration of polymer and SiN waveguides
Optics Express
|September 15, 2023
Summary
This study introduces a novel optical phased array (OPA) LiDAR scanner by integrating polymer and silicon nitride waveguides. This approach achieves efficient beamforming and stable scanning with low connection loss.
Area of Science:
- Photonics and Materials Science
- Integrated Optics
- LiDAR Technology
Background:
- Optical phased arrays (OPAs) are crucial for LiDAR systems.
- Integrating dissimilar photonic materials presents challenges in achieving low loss and high performance.
- Silicon nitride (SiN) offers strong modal confinement and high optical power capacity, while polymers provide a superior thermo-optic effect.
Purpose of the Study:
- To develop a novel OPA beam scanner for LiDAR applications.
- To demonstrate the benefits of integrating polymer and SiN waveguides in a monolithic OPA.
- To achieve low-loss, high-performance beamforming and scanning.
Main Methods:
- Fabrication of a monolithic OPA device by integrating polymer and SiN waveguides.
- Characterization of the connection loss between the two waveguide types.
- Evaluation of the OPA device's optical throughput, beamforming efficiency, and scanning stability.
Main Results:
- Achieved a remarkably low connection loss of 0.15 dB between polymer and SiN waveguides.
- Demonstrated a low-loss monolithic OPA device with high optical throughput.
- Exhibited efficient beamforming and stable beam scanning capabilities.
Conclusions:
- The integration of polymer and SiN waveguides is a viable strategy for advanced photonic integrated circuits.
- This heterogeneous approach enables the development of high-performance OPA devices for LiDAR.
- The proposed OPA scanner shows significant potential for next-generation LiDAR systems.

