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Flexible Capacitive Pressure Sensor with High Sensitivity and Wide Range Based on a Cheetah Leg Structure via 3D
Weiqiang Hong1,2,3, Xiaohui Guo1, Tianxu Zhang1
1Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China.
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Flexible pressure sensors can be used in human-computer interaction and wearable electronic devices, but one main challenge is to fabricate capacitive sensors with a wide pressure range and high sensitivity. Here, we designed a capacitive pressure sensor based on a bionic cheetah leg microstructure, validated the benefits of the bionic microstructure design, and optimized the structural feature parameters using 3D printing technology. The pressure sensor inspired by the cheetah leg shape has a high sensitivity (0.75 kPa-1), a wide linear sensing range (0-280 kPa), a fast response time of roughly 80 ms, and outstanding durability (24,000 cycles). Furthermore, the sensor can recognize a finger-operated mouse, monitor human motion, and transmit Morse code information. This work demonstrates that bionic capacitive pressure sensors hold considerable promise for use in wearable devices.
