Energy-efficient integrated silicon optical phased array

An optical phased array (OPA) is a promising non-mechanical technique for beam steering in solid-state light detection and ranging systems. The performance of the OPA largely depends on the phase shifter, which affects power consumption, insertion loss, modulation speed, and footprint. However, for a thermo-optic phase shifter, achieving good performance in all aspects is challenging due to trade-offs among these aspects. In this work, we propose and demonstrate two types of energy-efficient optical phase shifters that overcome these trade-offs and achieve a well-balanced performance in all aspects. Additionally, the proposed round-spiral phase shifter is robust in fabrication and fully compatible with deep ultraviolet (DUV) processes, making it an ideal building block for large-scale photonic integrated circuits (PICs). Using the high-performance phase shifter, we propose a periodic OPA with low power consumption, whose maximum electric power consumption within the field of view is only 0.33 W. Moreover, we designed Gaussian power distribution in both the azimuthal ([Formula: see text]) and polar ([Formula: see text]) directions and experimentally achieved a large sidelobe suppression ratio of 15.1 and 25 dB, respectively.