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Related Experiment Video

Updated: Jul 16, 2025

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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Energy-efficient integrated silicon optical phased array.

Huaqing Qiu1,2, Yong Liu1, Xiansong Meng1

  • 1DTU Electro, Department of Electrical and Photonics Engineering, Technical University of Denmark, Kgs. Lyngby, DK-2800, Denmark.

Frontiers of Optoelectronics
|September 22, 2023
PubMed
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This summary is machine-generated.

This study introduces energy-efficient optical phase shifters for optical phased arrays (OPAs). These novel phase shifters enable high-performance, low-power beam steering in light detection and ranging systems.

Area of Science:

  • Photonics and Optical Engineering
  • Integrated Optics
  • Solid-State Systems

Background:

  • Optical phased arrays (OPAs) are key for non-mechanical beam steering in light detection and ranging (LiDAR).
  • Thermo-optic phase shifters are critical components in OPAs, but face trade-offs in power consumption, insertion loss, speed, and footprint.
  • Existing phase shifter designs struggle to balance these performance metrics.

Purpose of the Study:

  • To propose and demonstrate novel, energy-efficient optical phase shifters that overcome performance trade-offs.
  • To develop a periodic OPA utilizing these high-performance phase shifters for reduced power consumption.
  • To investigate fabrication robustness and process compatibility for large-scale photonic integrated circuits.

Main Methods:

Keywords:
Integrated opticsOptical phase shifterOptical phased arraySilicon photonics

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  • Design and fabrication of two types of energy-efficient optical phase shifters.
  • Integration of phase shifters into a periodic OPA architecture.
  • Experimental characterization of OPA power consumption, beam steering, and sidelobe suppression.
  • Design of Gaussian power distribution for azimuthal and polar directions.

    • Main Results:

    • Demonstration of well-balanced phase shifter performance, overcoming traditional trade-offs.
    • Achieved a periodic OPA with remarkably low maximum electric power consumption of 0.33 W within the field of view.
    • Experimentally obtained high sidelobe suppression ratios of 15.1 dB and 25 dB in azimuthal and polar directions, respectively.
    • The proposed round-spiral phase shifter shows fabrication robustness and deep ultraviolet (DUV) process compatibility.

    Conclusions:

    • The developed energy-efficient optical phase shifters offer a balanced performance profile, suitable for advanced photonic integrated circuits.
    • The proposed periodic OPA architecture significantly reduces power consumption for beam steering applications.
    • The achieved sidelobe suppression demonstrates the potential for high-fidelity beam control in LiDAR and other optical systems.