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Updated: Jul 15, 2025

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
Sourav Islam1, Marco Sangermano2, Thomas A Klar1
1Institute of Applied Physics, Johannes Kepler University Linz, 4040 Linz, Austria.
Researchers enhanced two-photon polymerization for cationic polymers using stimulated emission depletion (STED)-inspired techniques. This advancement allows for significantly smaller epoxy lines, crucial for semiconductor manufacturing.
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