In situ spin coater for multimodal grazing incidence x-ray scattering studies

Aidan H Coffey1,2, Jonathan Slack1, Earl Cornell1

  • 1Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.

PubMed
Summary

We developed a novel in situ spin coater integrated with X-ray scattering for real-time thin film analysis. This system tracks structural changes during fabrication, aiding material development.