A High-Precision Quartz Resonant Ultra-High Pressure Sensor with Integrated Pressure Conversion Structure

Area of Science:

• Materials Science
• Sensor Technology
• Physics

Background:

• Ultra-high pressure measurement is critical in fields like deep-sea exploration and oil/gas.
• Existing sensors often face challenges with accuracy, stability, and drift due to assembly processes.
• A need exists for robust and precise pressure sensors capable of withstanding extreme conditions.

Purpose of the Study:

• To propose and validate a novel quartz resonant pressure sensor for high-precision ultra-high pressure measurement.
• To address common-mode interference and output drift issues in pressure sensor design.
• To provide a new solution for specialized pressure detection in challenging environments.

Main Methods:

• Design of a quartz resonant unit with a push-pull differential layout for axial force application.
• Integrated pressure conversion unit to mitigate assembly-related drift.
• Theoretical analysis, simulation, and prototype fabrication for performance evaluation.
• Experimental testing to determine sensitivity and comprehensive accuracy across pressure and temperature ranges.

Main Results:

• The quartz resonant pressure sensor demonstrated a sensitivity of 46.32 Hz/MPa at room temperature up to 120 MPa.
• Achieved a comprehensive accuracy of 0.0266% within the tested pressure range.
• Maintained comprehensive accuracy better than 0.0288% FS across the full temperature range.
• Validated the sensor's feasibility and performance through theoretical, simulation, and experimental studies.

Conclusions:

• The proposed quartz resonant pressure sensor design is highly suitable for precise and stable ultra-high pressure detection.
• The integrated design and differential layout effectively minimize interference and drift.
• This sensor technology offers a promising new solution for critical applications in deep-sea and oil exploration industries.