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A Hybrid Strategy for Profile Measurement of Micro Gear Teeth
Guangyao Huang1, Jiao Bai2, Feng Feng1
1Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.
Micromachines
|September 28, 2023
Summary
This study introduces a hybrid strategy for precise micro gear teeth profiling. The novel method combines contact and noncontact sensors, achieving high accuracy without probe collision.
Area of Science:
- Metrology
- Mechanical Engineering
- Nanotechnology
Background:
- Accurate measurement of micro gear profiles is challenging due to small modulus and potential probe interference.
- Existing methods may struggle with collision avoidance and precision for micro-scale components.
Purpose of the Study:
- To develop a hybrid measurement strategy for accurate micro gear teeth profiling.
- To overcome limitations of single-probe methods in measuring small-modulus gears.
Main Methods:
- A hybrid approach combining a contact probe with an auxiliary lifting mechanism for flank profile measurement.
- Utilizing a noncontact chromatic confocal displacement sensor for gear peak position acquisition.
- Implementing two-point error separation using combined probe and sensor data.
Main Results:
- The hybrid strategy successfully obtained the profile of a harmonic drive flexspline.
- Measurement results showed a deviation of less than 20 μm compared to commercial profilers.
- The method demonstrated feasibility and accuracy for micro gear teeth profile measurement.
Conclusions:
- The proposed hybrid strategy is a feasible and accurate solution for micro gear teeth profiling.
- Collision-free measurement is achieved, enhancing reliability for micro-scale metrology.
- This method offers a significant improvement over existing techniques for small-modulus gears.
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