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Application of Ni/SiCw Composite Material in MEMS Microspring
Liyan Lai1, Guanliang Yu1, Guilian Wang2
1School of Science, Shanghai Institute of Technology, Shanghai 201418, China.
Micromachines
|September 28, 2023
Summary
This study enhances microsprings for MEMS devices by incorporating silicon carbide nanowires into nickel composites. These improved microsprings offer greater durability and a wider linear range, ensuring stable operation in demanding environments.
Area of Science:
- Materials Science
- Mechanical Engineering
- Microelectromechanical Systems (MEMS)
Background:
- Microsprings are crucial MEMS components, but pure nickel versions suffer from low yield strength and toughness.
- Existing UV-LIGA fabricated nickel microsprings have limitations for stable, long-term operation.
Purpose of the Study:
- To develop high-aspect-ratio nickel/silicon carbide nanowire (Ni/SiCw) microstructures for MEMS applications.
- To enhance the mechanical properties and operational stability of microsprings.
- To investigate the effects of heat treatment on Ni/SiCw composite properties.
Main Methods:
- Fabrication of Ni/SiCw microstructures using UV-LIGA technology.
- Development of 300 μm thick Ni/SiCw microspring samples.
- Mechanical characterization using a DMA tensile tester.
- Analysis of heat treatment effects at 300 °C and 600 °C.
Main Results:
- Ni/SiCw microsprings exhibit a 1.2 times wider linear range compared to pure nickel microsprings.
- The composite material demonstrates enhanced resistance to plastic deformation.
- Heat treatment influences the tensile properties and microstructure of the composite coatings.
- Ni/SiCw microsprings are suitable for MEMS applications below 300 °C.
Conclusions:
- Ni/SiCw composites significantly improve microspring performance for MEMS devices.
- The enhanced properties ensure more stable and enduring operation of microsprings.
- This research offers valuable insights for designing robust microsprings with extended cyclic operating life.
