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Updated: Jul 14, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Higher-order mode filtering by a resistive layer
Svetlana Kuznetsova1,2, Yves Aurégan1, Vincent Pagneux1
1Laboratoire d'Acoustique de l'Université du Mans (LAUM), UMR 6613, Institut d'Acoustique - Graduate School (IA-GS), CNRS, Le Mans Université, Avenue O. Messiaen, 72085 LE MANS CEDEX 9, France.
Abstract:
A method for filtering higher-order acoustic modes using a resistive layer is proposed and applied to a two-dimensional rectangular waveguide with a quiescent fluid. An analogue of Cremer's criterion is discussed and used to obtain the optimal modal attenuation of the non-planar waves while the plane wave is preserved. Numerical validation of the concept is performed for a straight waveguide and an abrupt expansion in a waveguide.
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