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High-precision laser beam lateral displacement measurement based on differential wavefront sensing
Optics Letters
|October 13, 2023
Summary
We developed a high-precision lateral displacement measurement technique using differential wavefront sensing (DWS). This method achieves a 40 pm/Hz1/2 resolution, outperforming traditional methods for non-contact sensing applications.
Area of Science:
- Optics
- Metrology
- Sensing Technologies
Background:
- Accurate lateral displacement measurement is critical for advanced non-contact sensing.
- Conventional methods like differential power sensing (DPS) have limitations in resolution.
Purpose of the Study:
- Introduce a novel, high-precision lateral displacement measurement method.
- Leverage differential wavefront sensing (DWS) for enhanced resolution.
Main Methods:
- Utilized differential wavefront sensing (DWS) based on phase readout.
- Analyzed wavefront curvature distribution on a detector surface.
- Employed lenses to increase laser beam wavefront curvature for improved sensitivity.
Main Results:
- Achieved a measurement resolution of 40 pm/Hz1/2 (at 1-10 Hz).
- Demonstrated a linear measurement range of approximately 40 µm.
- Experimental results aligned with the theoretical DWS model.
Conclusions:
- The DWS method offers superior resolution compared to DPS.
- The technique is validated by experimental calibration with a hexapod.
- Applicable to high-precision multi-degree-of-freedom interferometers.
