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Wavefront restoration from lateral shearing data using spectral interpolation.

Satoshi Tomioka, Naoki Miyamoto, Yuji Yamauchi

|October 19, 2023

Summary

This study introduces a new spectral interpolation technique to improve lateral-shear interferometry. The method accurately restores wavefronts using only two interferograms, overcoming previous limitations.

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Area of Science:

Optical Metrology
Wavefront Sensing

Background:

Lateral-shear interferometers offer vibration robustness but yield differential wavefront information, losing specific frequency components.
Previous methods required four interferograms with varying shear to reconstruct 2D wavefronts accurately.

Purpose of the Study:

To propose a novel technique reducing the number of interferograms needed for accurate 2D wavefront restoration.
To enhance the capabilities of lateral-shear interferometry by addressing its inherent limitations.

Main Methods:

Employing spectral interpolation to reduce required interferograms.
Implementing an origin-shift technique for accurate spectral interpolation.
Combining natural extension and least-squares determination for ambiguity resolution.

Main Results:

Successfully restored a two-dimensional wavefront using only two interferograms.
Demonstrated the accuracy of the proposed spectral interpolation and origin-shift technique through numerical simulations.

Conclusions:

The proposed method significantly reduces the data acquisition requirements for lateral-shear interferometry.
This technique offers a more efficient and accurate approach to wavefront restoration, overcoming previous limitations.