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Photothermal Lithography for Realizing a Stretchable Multilayer Electronic Circuit Using a Laser.
Sangmin Song1,2, Hyejun Hong1,3, Kyung Yeun Kim1,2
1Biomaterials Research Center, Biomedical Research Division, Korea Institute of Science and Technology, Seoul 02792, Republic of Korea.
ACS Nano
|October 19, 2023
Summary
Photothermal lithography enables patterning of stretchable electronic circuits using lasers. This new method improves conductivity and durability for advanced multilayer applications.
Area of Science:
- Materials Science
- Electrical Engineering
- Nanotechnology
Background:
- Photolithography is standard for multilayer circuits but struggles with stretchable conductors due to opacity.
- Fabricating intrinsically stretchable multilayer electronic circuits faces challenges with current methods.
Purpose of the Study:
- To introduce photothermal lithography for patterning elastomeric conductors and via holes.
- To overcome limitations of photolithography for stretchable electronics.
Main Methods:
- Utilized pulsed lasers for photothermal patterning of elastomeric nanocomposite conductors and via holes.
- Investigated the conductivity and resistance change of patterned conductors under strain.
- Demonstrated layer-by-layer integration for multilayer circuit fabrication.
Main Results:
- Photothermal-patterned conductors showed 3x higher conductivity (5940 S cm⁻¹) and significantly lower resistance change under strain compared to screen-printed ones.
- Achieved patterning of 50 μm stretchable via holes without ablation or electrical degradation.
- Successfully fabricated multilayer circuits with enhanced conductivity and durability.
Conclusions:
- Photothermal lithography offers a viable method for creating durable, high-density, and multifunctional stretchable multilayer electronic circuits.
- Demonstrated potential applications include stretchable wireless pressure sensors and passive matrix LED arrays.

