Lissajous MEMS laser beam scanner with uniform and high fill-factor projection for augmented reality display

MEMS Laser beam scanning (LBS) has been identified as a key advancement for augmented reality (AR) displays due to its ability to create compact optical systems that generate bright, high-contrast images with minimal heat dissipation. This innovation can be attributed to the focus-free, efficient light-on-demand pixel projection mechanisms integral to LBS. The LBS, specifically in Lissajous-mode, outperforms the raster-mode in terms of larger scan angles and stability to external vibrations, by leveraging a MEMS mirror operating at bi-axial resonance. However, it tends to be hampered by small mirror aperture, low fill-factor, and inconsistent uniformity of image projection. In this research, a unique gimbal-less Lissajous MEMS scanner was proposed. It employs a bi-axial high frequency of 12,255 Hz and 7,182 Hz to achieve a resolution of 640 × 360 pixels and a video refresh rate of 57 Hz, all while maintaining a high image fill factor of 85.11%. The robust structure of the mirror is proven to sustain stable scanning under broad spectrum of external vibration disturbance up to 2,000 Hz. Furthermore, the large mirror diameter of 2 mm improves refined pixel projection and increased optical etendue for exit pupil. Mathematic model of Lissajous pixel-cells and image reconstruction simulation were established to validate the LBS's ability to generate a uniform and densely pixelated visual effect that fits for typical AR head-up display (AR-HUD). In a pioneering move, performance metric of figure-of-merit was defined to evaluate AR light-engines using varied picture-generation techniques, laying a foundation for guiding future AR system development.