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Single thermal scan digital system for deep level transient spectroscopy.

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A new micro-controller based Deep Level Transient Spectroscopy (DLTS) system, utilizing Arduino-Due, efficiently identifies semiconductor defects. This cost-effective and accurate system simplifies defect analysis, offering versatile applications.

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Area of Science:

  • Materials Science
  • Electrical Engineering
  • Semiconductor Physics

Background:

  • Deep-level defects in semiconductors significantly impact device performance.
  • Traditional Deep Level Transient Spectroscopy (DLTS) systems can be complex and expensive.
  • Accurate characterization of these defects is crucial for semiconductor development.

Purpose of the Study:

  • To develop a novel, cost-effective, and user-friendly micro-controller based Deep Level Transient Spectroscopy (DLTS) system.
  • To implement advanced signal processing algorithms for defect identification.
  • To validate the system's performance using well-characterized semiconductor samples.

Main Methods:

  • Development of a DLTS system integrating Arduino-Due, a capacitance meter, and interface circuits.
  • Implementation of custom algorithms for digital control of filling pulse generation, data acquisition, and signal processing.
  • Fabrication and testing of gold-doped silicon p-n junction samples to verify system accuracy.

Main Results:

  • The micro-controller based DLTS system successfully identified deep-level defects in silicon.
  • Calculated defect parameters (energy, capture cross-section, concentration) showed good agreement with literature values.
  • The system demonstrated a minimum pulse width of 50 ns and high data acquisition resolution.

Conclusions:

  • The developed micro-controller based DLTS system offers a simple, inexpensive, and accurate solution for semiconductor defect analysis.
  • The system's digital control and efficient processing minimize errors and experimental time.
  • The versatility of the system is confirmed by its successful application to gold-doped silicon.