Related Experiment Video
Updated: Jul 12, 2025

Scanning-probe Single-electron Capacitance Spectroscopy
Published on: July 30, 2013
The resolutions of drive-level capacitance profiling technique
Xin Zhang1, Yang Ma2, Zihang Zhang2
1Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124, China.
Abstract:
Recently, the drive level capacitance profiling (DLCP) technique has been proven to be effective in resolving the spatial and energetic distributions of defects through feasible measurements. However, the discussion on its ranges and resolutions is still missing, which is urgent in evaluating the validity of the calculated defect profiles. In this work, we propose a method to analyze the ranges and resolutions of DLCP. Assuming that the test instrument has more influence on the experimental results than the experimental environment, this method can be used to evaluate the resolution of DLCP for different test instruments. Through revisiting the equations involved in DLCP, we learned that the sources of the limits and resolutions are (1) the instrument system error and inherent resolution and (2) the device impedance. Consequently, from the study of device impedance and the measuring instrument system error, the resolutions of DLCP could be calculated according to the error propagation theory. We provide the spatial distribution of the minimum selection range of AC signal δV used by DLCP and the spatial resolution of DLCP technology. This method can be used to evaluate the resolution of DLCP for different test instruments.
More Related Videos
Related Concept Videos
Equivalent Capacitance
The following strategies are adopted to calculate...
Capacitors and Capacitance
When the conductors are two identical parallel plates, it is called a parallel plate capacitor. When battery terminals are...
Design Example: Capacitance Multiplier Circuit
The circuit illustrated in Figure 1 below incorporates two op-amps, with the first operating as a voltage follower and the second acting as an inverting amplifier.
Capacitors
When a voltage source is connected to a capacitor, positive and negative charges accumulate on the opposite plates. This accumulation generates a potential difference that equals the product of the...
Dielectric Polarization in a Capacitor
MOS Capacitor
The metal gate is typically made from highly conductive materials such as aluminum or polysilicon. Beneath the metal gate lies a thin layer of...

