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Atom counting based on Voronoi averaged STEM intensities using a crosstalk correction scheme.

Florian F Krause1, Andreas Rosenauer2

  • 1Institut für Festkörperphysik, Universität Bremen, Otto-Hahn-Allee 1, 28359 Bremen, Germany.

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|October 23, 2023
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Summary

This study introduces a novel algebraic method to correct signal crosstalk in atom counting using scanning transmission electron microscopy (STEM). The technique significantly improves measurement precision for atomic-scale thickness determination.

Keywords:
Atom countingHAADFPrecision thickness measurementsQuantitative STEMTEM

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Area of Science:

  • Materials Science
  • Physics
  • Nanotechnology

Background:

  • Quantitative scanning transmission electron microscopy (STEM) is crucial for precise thickness measurements at atomic resolution, often termed 'atom counting'.
  • Signal intensity in STEM is affected by neighbouring atomic columns (crosstalk), especially in thicker specimens, reducing measurement accuracy.
  • Accounting for all neighbour configurations is computationally challenging, hindering precise atom counting.

Purpose of the Study:

  • To develop a method for a-posteriori crosstalk reduction in STEM atom counting.
  • To enhance the accuracy and precision of thickness measurements in atomic-scale analysis.
  • To provide a computationally efficient approach for correcting crosstalk effects.

Main Methods:

  • A parametric model was developed to describe crosstalk effects in STEM imaging.
  • Crosstalk was represented by an invertible matrix, allowing for algebraic correction.
  • The method was validated using multislice simulations and applied to crystalline gold and gold nanoparticles.

Main Results:

  • The proposed algebraic method effectively reduces crosstalk with minimal computational cost.
  • Crosstalk-corrected intensity values enable direct comparison with reference data for improved accuracy.
  • Simulative studies demonstrated a significant and robust improvement in measurement precision.

Conclusions:

  • The developed method offers a powerful tool for accurate atom counting in STEM.
  • It overcomes limitations of previous methods by efficiently correcting crosstalk effects.
  • This technique promises to advance atomic-resolution thickness measurements in materials science.