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Related Experiment Video

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Programmable MZI based on a silicon photonic MEMS-tunable delay line.

Myung S Hong, Min G Lim, Dong U Kim

    Optics Letters
    |November 1, 2023
    PubMed
    Summary

    We developed a scalable silicon photonic Mach-Zehnder interferometer (MZI) with tunable free spectral range (FSR) and extinction ratio (ER) using microelectromechanical systems (MEMS). This MEMS-based approach offers low optical loss and high scalability for integrated photonic devices.

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    Area of Science:

    • Integrated photonics
    • Silicon photonics
    • Microelectromechanical systems (MEMS)

    Background:

    • Mach-Zehnder interferometers (MZIs) are fundamental photonic devices.
    • Achieving tunable free spectral range (FSR) and extinction ratio (ER) in MZIs often involves complex or lossy configurations.
    • Scalability and low power consumption are critical for advanced photonic integrated circuits.

    Purpose of the Study:

    • To design and demonstrate a scalable and programmable integrated MZI.
    • To achieve tunable FSR and ER with minimal optical loss.
    • To leverage silicon photonic MEMS for dynamic control of interferometric parameters.

    Main Methods:

    • Development of a novel tunable delay line using silicon photonic MEMS.
    • Integration of the tunable delay line into an MZI architecture.
    • Characterization of the MZI's FSR, ER, and tuning energy.

    Main Results:

    • Demonstration of an MZI with dynamically tunable FSR and ER.
    • The MEMS-based tunable delay line allows geometric length modification without additional optical loss.
    • Achieved a low tuning energy of 8.46 pJ for length reconfiguration.
    • The proposed device exhibits superior scalability in terms of optical loss compared to cascaded MZI approaches.

    Conclusions:

    • The developed silicon photonic MEMS-based MZI offers a scalable and efficient solution for tunable photonic integrated circuits.
    • This technology enables flexible control over MZI parameters with minimal power consumption and optical loss.
    • The approach paves the way for advanced applications in optical signal processing and communications.