Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection.

Francesc Torres1, Arantxa Uranga1, Núria Barniol1

  • 1Electronic Engineering Department, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB, 08193 Cerdanyola del Valles, Spain.

PubMed
Summary

This study introduces a microelectromechanical system (MEMS) resonator as a high-resolution humidity sensor. It demonstrates potential for detecting human activity via finger moisture, enabling low-power sensing applications.