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Evaluation of a Smartphone-based Human Activity Recognition System in a Daily Living Environment
Published on: December 11, 2015
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Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection.
Francesc Torres1, Arantxa Uranga1, Núria Barniol1
1Electronic Engineering Department, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB, 08193 Cerdanyola del Valles, Spain.
Sensors (Basel, Switzerland)
|November 14, 2023
Summary
This study introduces a microelectromechanical system (MEMS) resonator as a high-resolution humidity sensor. It demonstrates potential for detecting human activity via finger moisture, enabling low-power sensing applications.
Area of Science:
- Microelectromechanical Systems (MEMS)
- Sensor Technology
- Human Activity Monitoring
Background:
- Traditional human activity sensors often require significant power.
- There is a need for highly sensitive, low-power sensors for detecting subtle environmental changes.
Purpose of the Study:
- To develop and demonstrate a MEMS resonator as an ultra-high resolution water vapor sensor.
- To explore its application in detecting human activity through finger moisture detection.
Main Methods:
- Fabrication of a clamped-clamped beam MEMS resonator using commercial 0.35 μm CMOS technology.
- Monolithic integration of the resonator with conditioning and readout circuitry.
- Sensing mechanism based on resonance frequency shift due to water vapor adsorption.
Main Results:
- The MEMS resonator exhibits high sensitivity to water vapor.
- Fast response and quick dewetting properties were observed.
- Demonstrated feasibility for detecting human activity via finger moisture.
Conclusions:
- The developed MEMS resonator functions effectively as a humidity sensor.
- Its characteristics are suitable for developing low-power, high-speed human activity sensing systems.

