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Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
Published on: February 12, 2017
R R Dyachenko1,2, S A Matveev1,2, P L Krapivsky3,4
1Faculty of Computational Mathematics and Cybernetics, Lomonosov Moscow State University, Moscow, 119991, Russia.
This study explores cluster evolution through monomer collisions. Depending on whether monomers attach or chip away, systems jam, reach a quasistationary state, or form a unique non-extensive jammed state.
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