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Updated: Jul 10, 2025

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Shan Lu1, Jialin Li2,3, Wanping Shen1,4
1State Key Laboratory of Silicon and Advanced Semiconductor Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China.
Researchers synthesized large-area two-dimensional (2D) titanium nitride (TiN) nanosheets. These ultrathin TiN films exhibit thickness-dependent semiconducting properties and sensitive photoresponses, paving the way for novel electronic and optoelectronic devices.
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