A multimodal lithium niobate-based SAW gas sensor for accurate detection of carbon dioxide at elevated temperature

Carbon dioxide (CO2) detection is crucial for safety control, monitoring of the environment, and other industrial applications. The diverse fields of applications make the detection of CO₂ a challenging task. In this paper, a study on a multimodal surface acoustic wave (SAW) CO₂ sensing system was conducted to scrutinize the sensitivity of the lithium niobate-based multimodal SAW sensor towards CO₂ with temperature compensation. The study focused on developing and evaluating a SAW temperature-compensated gas sensor using time-of-flight measurements. The sensor exhibited good repeatability and sensitivity toward different concentrations of CO₂.