Electrochemical Activation of Atomic-Layer-Deposited Nickel Oxide for Water Oxidation

NiO-based electrocatalysts, known for their high activity, stability, and low cost in alkaline media, are recognized as promising candidates for the oxygen evolution reaction (OER). In parallel, atomic layer deposition (ALD) is actively researched for its ability to provide precise control over the synthesis of ultrathin electrocatalytic films, including film thickness, conformality, and chemical composition. This study examines how NiO bulk and surface properties affect the electrocatalytic performance for the OER while focusing on the prolonged electrochemical activation process. Two ALD methods, namely, plasma-assisted and thermal ALD, are employed as tools to deposit NiO films. Cyclic voltammetry analysis of ∼10 nm films in 1.0 M KOH solution reveals a multistep electrochemical activation process accompanied by phase transformation and delamination of activated nanostructures. The plasma-assisted ALD NiO film exhibits three times higher current density at 1.8 V vs RHE than its thermal ALD counterpart due to enhanced β-NiOOH formation during activation, thereby improving the OER activity. Additionally, the rougher surface formed during activation enhanced the overall catalytic activity of the films. The goal is to unravel the relationship between material properties and the performance of the resulting OER, specifically focusing on how the design of the material by ALD can lead to the enhancement of its electrocatalytic performance.