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    Area of Science:

    • Optical engineering
    • Metrology
    • Surface characterization

    Background:

    • Single-point-probe-based slope profilers are crucial for freeform optical surface measurement.
    • Efficiency in two-dimensional scanning presents a significant challenge.
    • Height reconstruction accuracy is vital for metrology applications.

    Purpose of the Study:

    • To investigate the correlation between sampling density and height reconstruction accuracy.
    • To evaluate the impact of spatial resolution calibration on measurement outcomes.
    • To develop an optimized measurement strategy for freeform optical surfaces using variable sampling intervals.

    Main Methods:

    • Established a measurement system simulation model for slope profilers.
    • Analyzed the influence of sampling density on reconstruction algorithms.
    • Applied variable sampling intervals tailored to the spatial frequency characteristics of the surface under test (SUT).
    • Calibrated the spatial resolution of the slope measurement device.

    Main Results:

    • Height reconstruction accuracy is strongly correlated with sampling density.
    • Calibrated spatial resolution is essential for accurate slope measurement.
    • Variable sampling intervals significantly improve reconstruction accuracy for surfaces with diverse spatial frequencies.
    • The proposed strategy allows for targeted optimization of measurement schemes.

    Conclusions:

    • Reconstruction accuracy can be effectively controlled by optimizing sampling parameters and calibrating the slope measurement device.
    • The developed strategy offers universality for general scanning slope measurement and height reconstruction.
    • Provides a valuable reference for device selection and sampling settings in metrology for varying spatial frequency requirements.