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High-precision surface profilometry on a micron-groove based on dual-comb electronically controlled optical sampling.

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    This study presents a new optical 3D profilometry method for micro-nano devices. It achieves 15 nm precision for large step structures, enabling detailed surface profiling.

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    Area of Science:

    • Optical Metrology
    • Nanotechnology
    • Surface Science

    Background:

    • Accurate 3D profilometry of micro-nano devices with large step structures is challenging.
    • Existing methods may lack the precision or speed required for complex microelectronic components.

    Purpose of the Study:

    • To demonstrate a novel optical method for high-precision 3D profilometry of micro-nano devices.
    • To enable rapid and accurate characterization of structures with large aspect ratios.

    Main Methods:

    • Utilizing dual-comb direct time-of-flight detection.
    • Employing an electronically controlled optical sampling (ECOPS) approach for enhanced acquisition rates.
    • Point-by-point scanning to acquire 3D point cloud data.

    Main Results:

    • Achieved a measurement precision of 15 nm in distance measurements with 4000 averages.
    • Successfully characterized a 10 µm wide, 62.3 µm deep rectangular micron-groove.
    • Quantitative 3D profile reconstruction of micro-structures with sub-micrometer precision.

    Conclusions:

    • The developed optical method offers high-precision and high-speed surface 3D profiling.
    • This technology has potential applications in the inspection of complex microelectronics devices.
    • The dual-comb time-of-flight approach is effective for large step structures.