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Wide field 3D optical profilometry using a diffraction Lloyd's mirror interferometer.

Monika Rani, Raj Kumar

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    |December 1, 2023
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    Summary
    This summary is machine-generated.

    A novel diffraction Lloyd's mirror interferometer (DLMI) enables wide-field 3D shape measurement. This system overcomes size limitations of conventional interferometers for large object profilometry.

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    Area of Science:

    • Optics and Photonics
    • Metrology and Measurement Science

    Background:

    • Interference fringe projection is a key non-contact optical profilometry technique for 3D measurements.
    • Conventional interferometric fringe projection systems face limitations in the maximum measurable object size due to optical constraints.

    Purpose of the Study:

    • To introduce and evaluate a diffraction Lloyd's mirror interferometer (DLMI) as a wide-field fringe projection system for 3D shape measurement.
    • To demonstrate the DLMI's capability for measuring larger objects compared to traditional methods.

    Main Methods:

    • Utilizing a diffraction Lloyd's mirror interferometer (DLMI) for generating sinusoidal interference fringes over a large area.
    • Applying the DLMI system for 3D shape measurement of test objects.
    • Evaluating system performance through stability and reproducibility assessments via phase value standard deviation.

    Main Results:

    • The DLMI successfully generates interference fringes over a large area, enabling wide-field projection.
    • The system demonstrated the capability to measure larger objects than conventional Lloyd's mirror interferometers.
    • Performance evaluation indicated stability and reproducibility in phase measurements.

    Conclusions:

    • The diffraction Lloyd's mirror interferometer (DLMI) is a viable and effective system for wide-field 3D shape measurement.
    • DLMI overcomes the size limitations inherent in traditional interferometric fringe projection methods.
    • The developed system offers a promising solution for the 3D profilometry of large-scale objects.