A lightweight transformer for faster and robust EBSD data collection
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Updated: Aug 11, 2026

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
Harry Dong1, Sean Donegan2, Megna Shah2
1Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, 15289, USA. harryd@andrew.cmu.edu.
Abstract:
Three dimensional electron back-scattered diffraction (EBSD) microscopy is a critical tool in many applications in materials science, yet its data quality can fluctuate greatly during the arduous collection process, particularly via serial-sectioning. Fortunately, 3D EBSD data is inherently sequential, opening up the opportunity to use transformers, state-of-the-art deep learning architectures that have made breakthroughs in a plethora of domains, for data processing and recovery. To be more robust to errors and accelerate this 3D EBSD data collection, we introduce a two step method that recovers missing slices in an 3D EBSD volume, using an efficient transformer model and a projection algorithm to process the transformer's outputs. Overcoming the computational and practical hurdles of deep learning with scarce high dimensional data, we train this model using only synthetic 3D EBSD data with self-supervision and obtain superior recovery accuracy on real 3D EBSD data, compared to existing methods.
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