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Updated: Jul 9, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Research on the bidirectional motion of resonant single-wing bionic piezoelectric motor based on a biasing
Liangguo He1, An Qian1, Xinyu Li1
1School of Mechanical Engineering, Hefei University of Technology, Hefei, Anhui 230009, China.
Abstract:
Based on our previous research, this article adds new research content and further refines the previous research on bionic motors. It is in the form of note as a complementary improvement to the previous article. This article proposes a novel approach to achieving reversal motion in such motors driven by a single harmonic signal, specifically the multimode mode of the vibrator. In contrast to the conventional inertial impact piezoelectric motor, we propose a bidirectional piezoelectric motor that can achieve bidirectional motion only by altering the driving signal characteristics. Compared to other bidirectional piezoelectric motors, this motor features a simpler structure and more convenient control. The COMSOL6.0 finite element analysis software was utilized to optimize the working mode of the piezoelectric motor, and an experimental platform was constructed for testing and verifying the performance of the designed prototype. The final experimental data demonstrate that, with an excitation voltage of 300 Vp-p, a preload of 2 N, and an excitation frequency of 781 Hz, the motor prototype achieves a maximum no-load speed of 12.15 mm/s, a maximum resolution of 15.27 μm, and a maximum load of 14 g. These results confirm the validity of the new working mode.
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