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Calibration of Vector Network Analyzer for Measurements in Radio Frequency Propagation Channels
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Measurements of variable capacitance using single port radio frequency reflectometry.

Rene Celis-Cordova1, Jacob J Gose1, Abigail F Brown1

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Radio frequency reflectometry can measure micro-electromechanical system variable capacitors for energy-efficient computing. This technique shows potential for characterizing devices in the 0-30 fF range, provided parasitic resistance is low.

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Area of Science:

  • Electrical Engineering
  • Materials Science
  • Computer Engineering

Background:

  • Adiabatic reversible computing offers energy-efficient computation by reducing heat dissipation.
  • Micro-electromechanical systems (MEMS) variable capacitors are crucial components for digital gates in reversible computing architectures.
  • Characterizing these variable capacitors is essential for optimizing circuit performance and energy efficiency.

Purpose of the Study:

  • To present a radio frequency (RF) reflectometry technique for measuring device capacitances.
  • To characterize MEMS variable capacitor devices for reversible computing applications.
  • To assess the feasibility of RF reflectometry for measuring variable capacitors within a specific capacitance range.

Main Methods:

  • Utilized single-port RF reflectometry with a custom-made RF probe featuring an on-board matching network.
  • Calibrated the RF probe using a capacitive bank to observe frequency shifts indicative of capacitance changes.
  • Measured static capacitors and MEMS variable capacitors to evaluate the technique's performance and limitations.

Main Results:

  • The RF reflectometry technique successfully measured static capacitors without significant parasitic resistance.
  • A high in-series parasitic resistance (approximately 80 kΩ) in MEMS variable capacitors masked the frequency shift, hindering accurate measurement.
  • RF reflectometry demonstrated potential for measuring MEMS variable capacitors in the 0-30 fF range when parasitic resistance is not a limiting factor.

Conclusions:

  • RF reflectometry is a potentially fast and versatile method for characterizing variable capacitors.
  • The technique's effectiveness is significantly impacted by parasitic resistance in the devices under test.
  • Further development is needed to overcome challenges associated with measuring high-resistance MEMS variable capacitors for energy-efficient computing applications.