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    Researchers developed thin silicon nitride (Si3N4) photonic devices for frequency combs. This approach overcomes stress issues in thicker films, enabling compact, low-noise dark pulse generation for telecommunications and spectroscopy.

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    Area of Science:

    • Integrated photonics
    • Materials science
    • Nonlinear optics

    Background:

    • Silicon nitride (Si3N4) is crucial for ultralow-loss integrated photonics and frequency comb generation.
    • Thick Si3N4 films (>600 nm) are needed for bright soliton generation but suffer from stress and cracking.
    • Thin Si3N4 films (<400 nm) offer advantages like one-step deposition but require optimized designs for nonlinearity.

    Purpose of the Study:

    • To engineer an integrated Si3N4 structure for optimal effective nonlinearity and compact footprint.
    • To investigate the trade-offs between waveguide thickness, nonlinearity, and device stability.
    • To demonstrate the feasibility of using thin Si3N4 films for advanced photonic applications.

    Main Methods:

    • Comparative analysis of Si3N4 resonators with varying waveguide thicknesses.
    • Experimental demonstration of dark pulse generation in a multimode Si3N4 resonator.
    • Characterization of resonator footprint, quality factor, and generated dark comb properties.

    Main Results:

    • A 400-nm thin Si3N4 film provides a balance between effective nonlinearity and device stability.
    • Low-noise coherent dark pulses with a 25 GHz repetition rate were generated.
    • A compact spiral resonator (0.28 mm²) with a high quality factor (4×10⁶) was fabricated.

    Conclusions:

    • Thin (400 nm) silicon nitride films are a viable alternative for integrated photonics, avoiding stress issues.
    • The demonstrated dark combs have significant potential for applications in microwave photonics, spectroscopy, and telecommunications.
    • Optimized thin-film Si3N4 resonators offer a promising platform for generating high-performance frequency combs.