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Updated: Jul 8, 2025

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
Cooperative Thermal-Electric Field Control of Infrared Modulation Using a Vanadium Dioxide Film-Based Modulator
Chang Lu1,2, Fan Yang2, Min Gao2
1Department of Electronic Communication and Technology, Shenzhen Institute of Information Technology, Shenzhen 518029, China.
Abstract:
Vanadium dioxide (VO2) has garnered significant attention as a material for actively tunable infrared (IR) modulators due to its reversible and responsive modulation effect on IR radiation, which is accompanied by its intrinsic insulator-metal phase transition (IMT). Here, we propose a multilayer device structure that integrates VO2 film with microheater and interdigitated electrodes for cooperative thermal-electric field control of IMT. Our results demonstrate that while intense electric fields can trigger abrupt IMT, deep modulation of IR radiation requires energy integration through Joule heating, which limits the response time of IR transmission controlled by electric field. Thus, cooperative thermal-electric field control, which provides a constant, uniform temperature field while electrically switching the IMT, is more effective for achieving a faster response time and retaining the intrinsic modulation depth of VO2-based IR modulators. Our findings offer valuable insights for the development of VO2-based IR modulators with improved performance.
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