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Related Experiment Video

Updated: Jul 7, 2025

Rendering SiO2/Si Surfaces Omniphobic by Carving Gas-Entrapping Microtextures Comprising Reentrant and Doubly Reentrant Cavities or Pillars

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Silicon flower structures by maskless plasma etching.

Geng Zhao^1,2,3, Xiaoyan Zhao⁴, Haimiao Zhang⁴

¹Institute of Solid State Physics, College of Physics and Electronic Science, Shanxi Province Key Laboratory of Microstructure Electromagnetic Functional Materials, Datong University, Datong, 037054, Shanxi Province, China.

|December 21, 2023

Summary

Researchers developed a new method to create black silicon, a material with light-trapping properties, from silicon flower microstructures. This advancement clarifies fabrication mechanisms and broadens light absorption for device applications.

Keywords:

Black silicon Fluorocarbon gas Infra-Red absorption Maskless plasma etching Silicon flower microstructures

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Area of Science:

Materials Science
Nanotechnology
Plasma Physics

Background:

Silicon nano/microstructures are crucial in the semiconductor industry.
Plasma etching is a key fabrication method for these structures.
Black silicon, known for light-trapping, is of significant interest but its fabrication and absorption properties require further study.

Purpose of the Study:

To investigate the fabrication mechanism of black silicon.
To explore the fabrication of black silicon from flower-like silicon microstructures.
To characterize the optical absorption properties of the resulting black silicon.

Main Methods:

Maskless plasma etching using fluorocarbon gases.
Fabrication of silicon flower microstructures.
Characterization of black silicon optical absorption across a wide wavelength range.

Main Results:

Successfully fabricated black silicon from individual silicon flower microstructures.
Demonstrated strong light absorption in black silicon from 0.25 μm to 20 μm.
Provided new insights into plasma etching mechanisms for silicon nanostructures.

Conclusions:

The study clarifies the fabrication of black silicon from silicon flower microstructures.
The developed black silicon exhibits broad spectral absorption, enhancing its potential applications.
Findings offer significant practical implications for advanced device manufacturing.