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MEMS Fluxgate Sensor Based on Liquid Casting
Ying Yang1,2, Wei Xu1,3, Guangyuan Chen1
1State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Micromachines
|December 23, 2023
Summary
Liquid casting rapidly forms 3D solenoid coils for micro-electromechanical system (MEMS) fluxgate sensors, enhancing performance. This new sensor design offers high sensitivity and low power consumption.
Area of Science:
- Materials Science
- Electrical Engineering
- Sensor Technology
Background:
- Traditional electroplating methods for micro-electromechanical system (MEMS) fluxgate sensors have limitations in coil formation.
- Liquid casting offers advantages in creating solenoid coils with improved dimensions (narrower line width, greater thickness).
Purpose of the Study:
- To propose and fabricate a novel MEMS fluxgate sensor utilizing liquid casting for solenoid coil formation.
- To enhance the performance of MEMS fluxgate sensors through optimized coil geometry and materials.
Main Methods:
- Design of the MEMS fluxgate sensor structure based on liquid casting process parameters.
- Simulation using MagNet software to determine optimal excitation conditions and sensitivity.
- Fabrication of the sensor based on simulation models.
Main Results:
- Achieved a high sensitivity of 2847 V/T.
- Measured noise level of 306 pT/√Hz at 1 Hz.
- Obtained a bandwidth of DC-10.5 kHz with a power consumption of 43.9 mW.
Conclusions:
- Liquid casting is a viable and advantageous method for fabricating high-performance MEMS fluxgate sensors.
- The developed sensor demonstrates superior sensitivity and low power consumption compared to similar-sized MEMS fluxgate sensors.
- The findings suggest potential for improved MEMS sensor applications using this fabrication technique.
