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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

MEMS Electrostatically Driven Coupled Beam Filter Banks.

Richard Syms¹, Adam Bouchaala¹

¹Department of Electrical and Electronic Engineering, Imperial College London, Exhibition Road, London SW7 2AZ, UK.

|December 23, 2023

Summary

Researchers developed novel Micro-Electro-Mechanical Systems (MEMS) bandpass filters using mass-loaded beams for improved tuning. This technique enables compact, high-performance filter banks for advanced applications.

Keywords:

MEMS coupled resonator mechanical filter

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Area of Science:

Electrical Engineering
Mechanical Engineering
Materials Science

Background:

Micro-Electro-Mechanical Systems (MEMS) bandpass filters are crucial for signal processing.
Existing filters face tuning difficulties, especially for higher orders and parallel plate designs.
In-plane motion and electrostatic actuation are common in MEMS filter designs.

Purpose of the Study:

To address tuning difficulties in higher-order MEMS bandpass filters.
To introduce a novel design using mass-loaded beams for synchronized electrostatic tuning.
To extend the principle to compact banks of similar or dissimilar filters.

Main Methods:

Demonstration of MEMS bandpass filters with electrostatically driven, mechanically coupled beams.
Incorporation of mass-loaded beams for DC voltage-induced deflection and synchronized tuning.
Modeling using a lumped element model (LEM) and simulation, verified by the stiffness matrix method (SMM).

Main Results:

Successfully demonstrated MEMS bandpass filters up to the VHF band.
Mass-loaded beams enable synchronized tuning without interfering with dynamic operation.
Simulations show effective performance for banks of up to eight filters.

Conclusions:

The proposed method effectively resolves inherent tuning difficulties in MEMS bandpass filters.
The design allows for compact, close-packed filter banks with localized modes.
The principle is extendable to higher-order resonances and alternative coupled resonator systems.