Related Experiment Video
Updated: Jul 7, 2025
13:02
Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation
Published on: February 25, 2017
9.8K
Precise Focal Spot Positioning on an Opaque Substrate Based on the Diffraction Phenomenon in Laser Microfabrication
Xian Jing1,2, Pengju Zhao2, Fuzeng Wang2
1College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.
Micromachines
|December 23, 2023
Summary
A new diffraction pattern-based focal spot positioning method (DFSPM) precisely locates laser focal spots on opaque substrates. This technique achieves 100 nm resolution, advancing laser microfabrication accuracy.
Area of Science:
- Materials Science
- Optical Engineering
- Nanotechnology
Background:
- Precise laser focal spot positioning is critical for effective laser microfabrication.
- Current methods may lack the required resolution for opaque substrates.
Purpose of the Study:
- To introduce a novel diffraction pattern-based focal spot positioning method (DFSPM).
- To enable precise laser focal spot alignment on opaque materials with high resolution.
Main Methods:
- Acquired diffraction patterns at various vertical positions using an ascending scanning method.
- Analyzed cross-section light distribution and Full Width at Half Maximum (FWHM) of the laser focal spot.
- Utilized FWHM thresholds of polynomial fitted curves to determine exact focal plane positioning.
Main Results:
- Demonstrated a monotonic tendency of FWHM away from the focal plane.
- Verified the FWHM tendency with polynomial fitted curves along the optical axis.
- Achieved precise focal spot positioning with a resolution of 100 nm.
Conclusions:
- The DFSPM offers a reliable method for accurate laser focal spot positioning on opaque substrates.
- This technique enhances precision in laser microfabrication processes.
- Provides valuable reference for advanced laser microfabrication applications.
