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Anatoliy Evtukh1,2, Anatoliy Kizjak1, Oleh Bratus1

  • 1V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, 41 Nauky ave., Kyiv 03028, Ukraine.

Nano Letters
|January 2, 2024
PubMed

Keywords:
Si nanoclusterscapacityelectron transport mechanismselectron trapsnanocomposite filmsoxynitride matrices

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