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HfO2-ZrO2 Ferroelectric Capacitors with Superlattice Structure: Improving Fatigue Stability, Fatigue Recovery, and

Mingshuang Kang1, Yue Peng1, Wenwu Xiao1,2

  • 1School of Microelectronics, Xidian University, Xi'an 710071, China.

ACS Applied Materials & Interfaces
|January 3, 2024
PubMed

Keywords:
FORCHfZrOxferroelectricsuperlatticeswitching dynamic

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