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Updated: Jul 6, 2025

Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures
Published on: December 5, 2015
Ultrashort channel MoSe2transistors with selenium atoms replaced at the interface: first-principles quantum-transport
Chih-Hung Chung1, Ting-Yu Chen1, Chiung-Yuan Lin1
1Department of Electronics and Electrical Engineering and Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu 300, Taiwan.
Researchers improved contact resistance in transition metal dichalcogenide (TMD) transistors by creating a novel metamaterial interface. This breakthrough enhances potential for nanoscale complementary metal oxide semiconductor (CMOS) logic devices.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Nanotechnology
Background:
- Achieving n- and p-type transition metal dichalcogenide (TMD) field-effect transistors for nanoscale complementary metal oxide semiconductor (CMOS) applications is hindered by high contact resistance.
- Developing efficient interfaces is crucial for advancing next-generation semiconductor devices.
Purpose of the Study:
- To investigate methods for reducing contact resistance in TMD-based transistors.
- To explore the creation of novel metamaterial interfaces for improved device performance.
Main Methods:
- Quantum transport calculations were employed to simulate interface modifications.
- Partial replacement of Selenium (Se) atoms in Molybdenum Diselenide (MoSe₂) with Arsenic (As) or Bromine (Br) atoms was performed at the interface.
Main Results:
- A new interface structure, MoSeX (Pt/MoSeX/MoSe₂; X = As, Br), was successfully created.
- These stable metamaterials exhibit semi-metallic properties, leading to a significant reduction in contact resistance.
- The findings demonstrate a viable pathway to lower contact resistance in MoSe₂.
Conclusions:
- The developed metamaterial interface offers a promising solution for overcoming contact resistance challenges in MoSe₂-based transistors.
- This research provides critical insights for the development of advanced nano-CMOS logic devices utilizing MoSe₂.
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