Large steering range and low-loss integrated optical phased array with SiN-Si dual-layer non-uniform antenna

Area of Science:

• Photonics and Optical Engineering
• Materials Science
• Electrical Engineering

Background:

• Optical phased arrays (OPAs) are crucial for beam steering in various applications.
• Existing OPA designs face challenges in balancing high-power handling, efficient modulation, and wide steering ranges.
• Integrating diverse materials like silicon nitride (SiN) and silicon (Si) offers potential solutions.

Purpose of the Study:

• To propose and demonstrate a novel 64-channel SiN-Si dual-layer optical phased array (OPA).
• To leverage the synergistic properties of SiN and Si for enhanced OPA performance.
• To introduce the thinned array concept to OPA design for improved efficiency.

Main Methods:

• Fabrication of a 64-channel SiN-Si dual-layer OPA.
• Utilizing a non-uniform dual-layer antenna design to enhance steering range and reduce emission loss.
• Employing a thinned array configuration, adapted from microwave phased arrays.
• Experimental characterization of the fabricated OPA.

Main Results:

• Demonstration of a 64-channel SiN-Si dual-layer OPA.
• Achieved a 2D scanning steering range of 120°×13.9°.
• Measured a high resolution of 0.052°×2.72°.
• Recorded a total insertion loss of 12.66 dB.

Conclusions:

• The proposed SiN-Si dual-layer OPA design successfully integrates high-power handling and efficient modulation.
• The novel antenna design and thinned array configuration significantly improve steering range and reduce loss.
• The demonstrated performance makes this OPA a promising candidate for high-resolution, long-distance light detection and ranging (Lidar) systems.