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Updated: Jul 6, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
High-performance plasmonic mid-infrared bandpass filters by inverse design
Jiarui Zhang1,2, Zeji Chen3, Zhijuan Su4
1National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 2005240, People's Republic of China.
None:
Plasmonic spectral filters composed of periodic nanostructured metal films offer novel opportunities for the development of multispectral imaging technologies in the mid-infrared region. However, traditional plasmonic filters, which typically feature simplistic structures such as nanoholes or nanorings, are constrained by a narrow bandpass and significant crosstalk, leading to limited practical performance. Filters designed using inverse techniques allow a substantial degree of freedom in creating intricate structures that align with desired spectral characteristics, including a quasi-square spectral profile, high transmission, wide full width at half maximum, and reduced crosstalk. In this study, we have utilized an inverse design algorithm to engineer high-performance bandpass filters for the mid-infrared range, achieving an average transmittance exceeding 80% within the bandpass window and below 10% in the stop band, which is comparable to that of commercial multilayer Bragg filters. Nanofabrication processes were employed to transfer the designed pattern into the gold film on ZnS substrate that is transparent in the mid-infrared range. The resulting filters exhibit spectral performance analogous to that of the inversely designed models, making them suitable for direct integration with mid-infrared photodetector arrays in multispectral imaging systems.
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