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All-Glass 100 mm Diameter Visible Metalens for Imaging the Cosmos
Joon-Suh Park1, Soon Wei Daniel Lim1, Arman Amirzhan1
1John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, United States.
ACS Nano
|January 17, 2024
Summary
Researchers created a large, 100 mm all-glass metasurface lens (metalens) using advanced lithography. This breakthrough enables the commercial production of large-area metalenses for applications like astronomical imaging.
Area of Science:
- Optics and Photonics
- Materials Science
- Nanotechnology
Background:
- Metasurfaces, composed of subwavelength nanostructures, offer novel optical functionalities.
- Previous large-area metasurface fabrication was limited by scaling challenges, restricting them to millimeter sizes.
Purpose of the Study:
- To demonstrate a scalable fabrication method for large-area metasurfaces.
- To create a 100 mm diameter metasurface lens (metalens) for visible light applications.
- To assess the commercial feasibility and robustness of large metasurfaces.
Main Methods:
- Utilized deep-ultraviolet (DUV) projection lithography to overcome exposure area limitations.
- Fabricated an all-glass 100 mm diameter metalens with 18.7 billion nanostructures.
- Investigated the impact of fabrication errors on imaging performance.
Main Results:
- Achieved a fast f-number (f/1.5, NA = 0.32) metalens operating in the visible spectrum.
- Demonstrated successful astronomical imaging of celestial bodies (Sun, Moon, nebulae).
- Validated the metalens' robustness under extreme thermal variations, suitable for space applications.
Conclusions:
- Large-area metasurfaces are commercially feasible through advanced lithography techniques.
- The developed metalens technology is robust and suitable for demanding applications, including space exploration.
- This work overcomes previous size limitations in metasurface fabrication.

