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Updated: Jul 5, 2025

Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
Published on: July 26, 2016
Epitaxial Stabilization and Persistent Nucleation of the 3C Polymorph of Ba0.6Sr0.4MnO3
Catherine Zhou1, Charles Evans1, Elizabeth C Dickey1
1Department of Materials Science and Engineering, Carnegie Mellon University, 5000 Forbes Avenue, Pittsburgh, Pennsylvania 15213, United States.
Abstract:
Ba-rich compositions in the BaSr1-MnO3 (BSMO) cubic perovskite (3C) system are magnetic ferroelectrics and are of interest for their strong magnetoelectric coupling. Beyond x = 0.5, they only form in hexagonal polymorphs. Here, the 3C phase boundary is pushed to Ba0.6Sr0.4MnO3 for the thin films. Using regular pulsed laser deposition (rPLD), 3C Ba0.6Sr0.4MnO3 could be epitaxially stabilized on DyScO3 (101)o substrates by using a 0.1% O2/99.9% N2 gas mixture. However, the 3C phase was mixed with the 4H polymorph for films 24 nm thick and above, and the films were relatively rough. To improve flatness and phase purity, changes in growth kinetics were investigated and interval PLD (iPLD) was especially effective. In iPLD, deposition is interrupted after completion of approximately one monolayer, and the deposit is annealed for a specific period of time before repeating. Both film flatness and, more importantly, the volume of the 3C polymorph improved with iPLD, resulting in 40 nm single-phase films. The results imply that iPLD improves the persistent nucleation of highly metastable phases and offers a new approach to epitaxial stabilization of novel materials, including more Ba-rich BSMO compositions in the 3C structure.
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