Design and analysis of impedance matching for a radial standing wave piezoelectric ultrasonic motor

Impedance matching circuits are capable of tuning and wave filtering, which is beneficial to performance improvement of piezoelectric ultrasonic motors. At present, impedance matching for piezoelectric ultrasonic motors is usually realized through a series inductance, which has the problem of poor wave filtering effect. Different from the previous series inductance matching method for ultrasonic motors, a series inductance and capacitance matching method is proposed for a radial standing wave piezoelectric ultrasonic motor. The series capacitance is added to adjust the quality factor of the resonance tank so that a desired wave filtering effect can be obtained. The values of the series inductance and capacitance are derived based on the Butterworth-Van Dyke model of the piezoelectric ultrasonic motor. Simulations are conducted to verify the feasibility of the proposed matching method. Finally, the waveforms of voltages and currents as well as torque-speed curves of the motor are measured. The results validate the proposed matching method. In addition, the previous series inductance matching method is compared. The results show that the proposed series inductance and capacitance matching method not only achieves tuning function but also obtains a significantly improved wave filtering effect. Moreover, the torque-speed characteristics of the motor are also improved with the proposed matching method.