Ultra-High Frequency Surface Acoustic Wave Sensors for Temperature Detection

Qi Dong1, Qutong Yang1, Xiaoyang Liu1

  • 1Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China.

Micromachines
|January 23, 2024
PubMed
Summary

This study introduces a novel, ultra-high frequency (UHF) surface acoustic wave (SAW) sensor for precise temperature detection. The Z-shaped SAW sensor design offers enhanced sensitivity and stability for industrial and medical uses.