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Tip-based Lithography with a Sacrificial Layer.

Jeong-Sik Jo1, Jinho Lee1, Chiwon Choi1

  • 1Division of Physics and Semiconductor Science, Dongguk University, Seoul, 04620, Republic of Korea.

Small (Weinheim an Der Bergstrasse, Germany)
|January 30, 2024
PubMed
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A new method uses a sacrificial layer to create precise gold nanohole arrays, enabling advanced applications like etching and enhancing surface-enhanced Raman scattering signals.

Area of Science:

  • Nanotechnology
  • Materials Science
  • Surface Chemistry

Background:

  • Controlled fabrication of nanoscale structures is crucial for advanced optical and electronic applications.
  • Tip-based lithography offers high resolution but can be limited by surface damage.
  • Gold nanohole arrays exhibit unique plasmonic properties for sensing and catalysis.

Purpose of the Study:

  • To improve the fabrication of gold nanohole arrays using tip-based lithography.
  • To demonstrate the versatility of the fabricated nanohole arrays in diverse applications.
  • To investigate the plasmonic enhancement effects within the nanohole structures.

Main Methods:

  • Utilizing a sacrificial poly(methyl methacrylate) layer to prevent scratches during tip-based nano-indentation.
Keywords:
hybrid plasmonic structurenanoholenanolithographysurface‐enhanced Raman scatteringtip‐based lithography

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  • Fabricating sub-50 nm gold nanohole arrays with precise inter-hole gaps.
  • Employing the gold nanohole arrays as dry etching masks and catalysts for nanostructure formation.
  • Investigating electromagnetic field enhancement and surface-enhanced Raman scattering (SERS) with gold nanoparticles within the nanoholes.

    • Main Results:

    • Successful fabrication of highly controlled gold nanohole arrays with minimal surface damage using a sacrificial layer.
    • Demonstrated applications in creating molybdenum disulfide hole arrays and conical silicon nanostructures.
    • Observed significant electric field enhancement due to electromagnetic coupling between gold nanoholes and nanoparticles.
    • Achieved an order of magnitude greater SERS enhancement factor compared to using gold nanoholes or nanoparticles alone.

    Conclusions:

    • The sacrificial layer approach significantly enhances the precision and quality of gold nanohole array fabrication.
    • The developed gold nanohole arrays are versatile platforms for nanofabrication and catalysis.
    • The combined gold nanohole and nanoparticle configuration offers superior plasmonic enhancement for SERS applications.