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Automatic measurement system for large-aperture-angle non-holonomic spherical stitching with laser differential
Applied Optics
|January 31, 2024
Summary
A new differential confocal interference system enables precise stitching measurements for large-aperture spherical surfaces. This automated system offers high accuracy and speed for non-holonomic surface analysis.
Area of Science:
- Optical metrology
- Surface metrology
- Nanotechnology
Background:
- Measuring large-aperture-angle non-holonomic spherical surfaces requires high precision and efficiency.
- Existing methods face challenges in accuracy and speed for complex surface geometries.
Purpose of the Study:
- To develop an automatic stitching measurement system for large-aperture-angle non-holonomic spherical surfaces.
- To achieve high-precision, efficient, and automated surface stitching measurements.
Main Methods:
- Differential confocal precise focusing technology for accurate confocal positioning.
- Subaperture data processing with stitching models, coordinate transformation, and error compensation.
- Automatic adjustment workbench for sample positioning and posture control.
Main Results:
- Achieved stitching measurement accuracy of 0.0013λ and a relative error of 1.36%.
- Completed stitching measurement of eight subapertures in just 6 minutes.
- Demonstrated automatic and rapid adjustment capabilities for large-aperture spherical elements.
Conclusions:
- The developed system provides high-precision, non-destructive, fast, and automatic surface stitching measurement.
- It addresses the need for efficient metrology of complex spherical surfaces.
- The system is suitable for demanding applications in optical manufacturing and testing.
