You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: Jul 4, 2025

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
Published on: February 12, 2017
Digital micromirror device (DMD) lithography edge smoothness is improved using a novel dynamic blur effect matching pixel overlay technology. This method significantly reduces sawtooth defects, enhancing microfabrication fidelity.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: