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Related Experiment Video

Updated: Jul 4, 2025

Radio Frequency Magnetron Sputtering of GdBa2Cu3O7âˆ'ÃŽ ´/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 STO Single-crystal Substrates
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Radio Frequency Magnetron Sputtering of GdBa2Cu3O7âˆ'ÃŽ ´/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 STO Single-crystal Substrates

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Evaluation of Sputtering Processes in Strontium Iridate Thin Films.

Víctor Fuentes1, Lluis Balcells1, Zorica Konstantinović2

  • 1Instituto de Ciencia de Materiales de Barcelona, ICMAB-CSIC, Campus Universitario UAB, 08193 Bellaterra, Spain.

Nanomaterials (Basel, Switzerland)
|February 9, 2024
PubMed
Summary

Epitaxial strontium iridate films grown by sputtering consistently form the SrIrO3 phase, driven by kinetic mechanisms over thermodynamic ones. This preferential phase nucleation is linked to sputtering dynamics and temperature.

Keywords:
complex oxidesepitaxial thin filmsgrowth mechanismsmagnetron sputteringspin–orbit coupling

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Area of Science:

  • Materials Science
  • Thin Film Growth
  • Solid State Chemistry

Background:

  • Ruddlesden-Popper (RP) series
  • Strontium iridates (SrIrO3)
  • Magnetron sputtering

Purpose of the Study:

  • Analyze epitaxial thin film growth
  • Investigate phase formation in strontium iridates
  • Understand kinetic vs. thermodynamic control

Main Methods:

  • Magnetron sputtering deposition
  • Temperature-oxygen phase diagram analysis
  • Angular distribution analysis of sputtered species

Main Results:

  • Consistent formation of the SrIrO3 phase (n=∞ RP phase)
  • Kinetic mechanisms dominate over thermodynamics
  • Differential spatial distribution of Sr and Ir species
  • Significant backsputtering at elevated temperatures

Conclusions:

  • Kinetic phenomena, including backsputtering and species distribution, drive preferential SrIrO3 nucleation
  • Strategies for off-axis cation stoichiometry control were explored
  • Demonstrated long-term stability of the grown films