Comparative Passivation of Si(100) by H2 and D2 Atmospheres under Simultaneous Xe+ Bombardment: An X-ray

V G Antunes1,2, M J M Jimenez2, F Cemin2

  • 1Université Grenoble Alpes, CNRS, CEA/LETI Minatec, Grenoble INP, LTM, F-38054 Grenoble, France.

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