Preparation of multilayer samples for scanning thermal microscopy examination

James Lees1, Marco Corbetta2, Matthias Kleine-Boymann3

  • 1The University of York, Heslington, YO10 5DD, United Kingdom.

Nanotechnology
|February 21, 2024
PubMed
Summary

Preparing multilayer materials for scanning thermal microscopy is crucial for examining thin film properties. Ion beam milling offers the most promising method for analyzing thermal transport in individual layers.